Solid state image sensor with fixed pattern noise reduction

ABSTRACT

A solid-state image sensor comprises unit pixels each having a photoelectric conversion element for converting incident light into electric signal charge and then storing the signal charge obtained through such photoelectric conversion, an amplifying element for converting into an electric signal the signal charge stored in the photoelectric conversion element, and a select switch for selectively outputting the pixel signal from the amplifying element to a signal line. The image sensor further comprises a reset circuit in each of the unit pixels for resetting the photoelectric conversion element every time a pixel signal is outputted from the relevant unit pixel. The photoelectric conversion element is reset every time a pixel signal is outputted, so that a pre-reset signal and a post-reset signal are delivered from each unit pixel and then are transferred via a common path, and the difference between such signals is taken to suppress not only the fixed pattern noise derived from characteristic deviation in each unit pixel but also vertically correlated fixed pattern noises of vertical streaks.

RELATED APPLICATION DATA

The present application claims priority to Japanese Application No.P09-220264 filed Aug. 15, 1997, and is a divisional of U.S. applicationSer. No. 09/134,153, filed Aug. 14, 1998, now U.S. Pat. No. 6,677,993,all of which are incorporated herein by reference to the extentpermitted by law.

BACKGROUND OF THE INVENTION

The present invention relates to a solid-state image sensor and a methodof driving the same, and more particularly to an amplifying typesolid-state imaging device such as a MOS image sensor having anamplifying function per unit pixel, and also to a method of driving suchan image sensor.

FIG. 14 shows an exemplary structure of a conventional two-dimensionalsolid-state image sensor known heretofore as an amplifying typesolid-state imaging device in the related art. In this diagram, a unitpixel 105 is composed of a photodiode 101, an amplifying MOS transistor102, a photodiode reset MOS transistor 103, and a vertical select MOStransistor 104. In this structure, a gate electrode of the photodiodereset MOS transistor 103 is connected to a vertical reset line 108, agate electrode of the vertical select MOS transistor 104 to a verticalselect line 109, and a source electrode of the vertical select MOStransistor 104 to a vertical signal line 110, respectively.

A horizontal select MOS transistor 112 is connected between one end ofthe vertical signal line 110 and a horizontal signal line 111. Theoperation of each pixel is controlled per row by two kinds of verticalscanning pulses φVSn and φVRn outputted from a row-select verticalscanning circuit 113, and a pixel signal is outputted to the horizontalsignal line 111 via the horizontal select MOS transistor 112 which iscontrolled by a horizontal scanning pulse φHm outputted from acolumn-select horizontal scanning circuit 114. At this time, the signalcharge stored in the photodiode 101 through photoelectric conversion isconverted into a signal current by the amplifying MOS transistor 102 andthen is delivered as an output signal of the image sensor.

However, in the known amplifying type two-dimensional solid-state imagesensor of the above structure, there exists a problem of characteristicdeviation in the active elements constituting each pixel, principally inthe amplifying MOS transistor 102, and particularly relative todeviation of the threshold voltage Vth of the MOS transistor. And suchdeviation is included directly in the output signal of the image sensor.Since this characteristic deviation has a fixed value per pixel, itappears as a fixed pattern noise (FPN) in the picture displayed on ascreen. For suppressing such fixed pattern noise, it is necessary toexternally connect to the device a noise elimination circuit using aframe memory or a line memory, so as to eliminate any noise componentderived from the characteristic deviation in the pixel. As a result, ina camera system or the like employing such a solid-state image sensor asan imaging device, the scale thereof is rendered larger correspondinglyto the noise elimination circuit connected thereto externally.

In comparison with the above, there is contrived another amplifying typesolid-state image sensor which has a structure of FIG. 15 and is capableof internally suppressing such fixed pattern noise in the device. Thedifference of this solid-state image sensor resides in the point that,although its unit pixel 105 is structurally the same as FIG. 14, ahorizontal output circuit 115 is provided for suppressing the fixedpattern noise derived from the characteristic deviation in the pixel105, and this horizontal output circuit 115 executes a process of takingthe difference between pre-read and post-read (pre-reset and post-reset)signals of the pixel 105.

In FIG. 15, a load MOS transistor 116 serving as a load to the sourcefollower operation of an amplifying MOS transistor 102 is connectedbetween a vertical signal line 110 and the ground. Further, one mainelectrode of each of paired signal switch MOS transistors 117 and 117′is connected to the vertical signal line 110. And a pair of signalholding capacitors 118 and 118′ are connected respectively between theground and the other main electrodes of such paired signal switch MOStransistors 117 and 117′.

Further a pair of horizontal select MOS transistors 112 and 112′ areconnected respectively between the other main electrodes of the pairedsignal switch MOS transistors 117, 117′ and a pair of horizontal signallines 111, 111′. And a noninverting (+) input terminal and an inverting(−) input terminal of a differential amplifier 119 are connectedrespectively to the pair of horizontal signal lines 111 and 111′.

In the amplifying type solid-state image sensor of the above structure,pixel pre-reset and post-reset signals are held respectively in signalholding capacitors 118, 118′ via the signal switch MOS transistors 117,117′ and then are supplied to the differential amplifier 119 via thehorizontal select MOS transistors 112, 112′ and the horizontal signallines 111, 111′. Subsequently, the difference between the pixelpre-reset and post-reset signals is taken in the differential amplifier119 to thereby eliminate the fixed pattern noise derived from thecharacteristic deviation in each unit pixel.

Although it is possible in the amplifying type solid-state image sensorof the above structure to suppress the fixed pattern noise derived fromthe characteristic deviation in each unit pixel, the pixel pre-reset andpost-reset signals reach the differential amplifier 119 via separatesignal paths, so that the characteristic deviations relative to thepaired signal switch MOS transistors 117, 117′ and the paired horizontalselect MOS transistors 112, 112′ appear in the picture as fixed patternnoises with vertically correlated streaks. Therefore, this structurealso requires an external correction circuit for suppressing the fixedpattern noises with vertical streaks.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide an improvedamplifying type solid-state image sensor which is capable ofsuppressing, within the device, any fixed pattern noise derived fromcharacteristic deviation in each unit pixel and also other fixed patternnoise of vertical streaks. And another object of the invention is toprovide a method of driving such an image sensor.

According to a first aspect of the invention, there is provided asolid-state image sensor which comprises unit pixels each having aphotoelectric conversion element for converting incident light intoelectric signal charge and then storing the signal charge obtainedthrough such photoelectric conversion, an amplifying element forconverting into an electric signal the signal charge stored in thephotoelectric conversion element, and a select switch for selectivelyoutputting the pixel signal from the amplifying element to a signalline; and a reset circuit in each of the unit pixels for resetting thephotoelectric conversion element every time a pixel signal is outputtedfrom the relevant unit pixel.

According to a second aspect of the present invention, there is provideda method of driving a solid-state image sensor of the above structure.The method comprises the steps of resetting the photoelectric conversionelement every time a pixel signal is outputted from the relevant unitpixel; then delivering a pre-reset signal and a post-reset signal fromeach unit pixel and taking the difference between the pre-reset signaland the post-reset signal.

And according to a third aspect of the present invention, there isprovided a camera which comprises an optical system for focusingincident light from an object scene to form an image thereof; asolid-state image sensor comprising unit pixels each having aphotoelectric conversion element for converting the optical image formedby the optical system into electric signal charge and then storing thesignal charge obtained through such photoelectric conversion, anamplifying element for converting into an electric signal the signalcharge stored in the photoelectric conversion element, and a selectswitch for selectively outputting the pixel signal from the amplifyingelement to a signal line, and a reset circuit in each of the unit pixelsfor resetting the photoelectric conversion element every time a pixelsignal is outputted from the relevant unit pixel; a drive capable ofdriving the solid-state image sensor; and a signal processor forprocessing the output signal of the solid-state image sensor.

In each of the unit pixels constituting the solid-state image sensor ofthe structure described above, the photoelectric conversion element isreset every time a pixel signal is outputted, so that a pre-reset signaland a post-reset signal per pixel are outputted successively from eachof the unit pixels. In this case, fixed pattern noise derived from anycharacteristic deviation in the pixel is generated as an offsetcomponent from the amplifying element of each pixel. Therefore, thenoise component can be canceled by taking the difference between thepre-reset signal and the post-reset signal. Further in thetwo-dimensional solid-state image sensor, the pre-reset and post-resetsignals are outputted from a vertical signal line to a horizontal signalline via a common signal path, so that fundamentally none of verticallycorrelated streak noise components is generated.

The above and other features and advantages of the present inventionwill become apparent from the following description which will be givenwith reference to the illustrative accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram showing the structure of a first embodiment ofthe present invention;

FIG. 2 is a timing chart of signals for explaining the operation of thefirst embodiment;

FIG. 3 is a circuit diagram showing an exemplary configuration of a CDScircuit;

FIGS. 4A and 4B graphically show Id-Vd characteristics of an enhancementtype MOS transistor and a depletion type MOS transistor, respectively;

FIG. 5 is a potential diagram for explaining the operation of a resetcircuit in the first embodiment;

FIG. 6 is a circuit diagram showing another structural example of a unitpixel;

FIG. 7 is a circuit diagram showing a further structural example of aunit pixel;

FIG. 8 is a potential diagram corresponding to the structure of FIG. 5;

FIG. 9 is a potential diagram corresponding to the structure of FIG. 6;

FIG. 10 is a block diagram showing the structure of a second embodimentof the present invention;

FIG. 11 is a timing chart of signals for explaining the operation of thesecond embodiment;

FIG. 12 is a potential diagram for explaining the operation of a resetcircuit in the second embodiment;

FIG. 13 is a schematic block diagram showing an exemplary structure of acamera of the present invention which employs a solid-state image sensorof the above structure;

FIG. 14 is a block diagram showing an exemplary known structure of therelated art; and

FIG. 15 is a block diagram for explaining the problems in the relatedart.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter some preferred embodiments of the present invention will bedescribed in detail with reference to the accompanying drawings. FIG. 1is a block diagram showing the structure of a first embodiment of thepresent invention.

In FIG. 1, the area enclosed with a broken line represents a unit pixel11. This unit pixel 11 is composed of a photodiode (PD) 12 as aphotoelectric conversion element, an amplifying MOS transistor 13 as anamplifying element, a select MOS transistor 14 as a select switch, areset MOS transistor 15 as a reset switch, and a reset select MOStransistor 16. Entire unit pixels are arrayed two dimensionally to forma matrix of rows and columns. In order to simplify the diagram, merelyone unit pixel 11 (mth column, nth row) is shown here.

In this unit pixel 11, the photodiode 12 has a function of executingphotoelectric conversion of incident light and storing the signal chargeobtained through such photoelectric conversion. A gate electrode of theamplifying MOS transistor 13 is connected to a cathode electrode of thephotodiode 12, while a drain electrode of the amplifying MOS transistor13 is connected to a power supply (VDD) line 17. And the select MOStransistor 14 is connected between a source electrode of the amplifyingMOS transistor 13 and a vertical signal line 18.

The reset MOS transistor 15 is connected between the cathode electrodeof the photodiode 12 and the power supply line 17, and the reset selectMOS transistor 16 is connected between a gate electrode of the reset MOStransistor 15 and a horizontal reset line 19. Each of the reset MOStransistor 15 and the reset select MOS transistor 16 consists of adepletion type transistor. The gate of this reset select MOS transistor16 is connected to a vertical select line 20 together with the gateelectrode of the select MOS transistor 14. And a horizontal select MOStransistor 22 is connected between the vertical signal line 18 and ahorizontal signal line 21.

Further a row-select vertical scanning circuit 23 and a column-selecthorizontal scanning circuit 24 are provided. A vertical scanning pulseφVn outputted from the vertical scanning circuit 23 is applied to thevertical select line 20, a horizontal reset pulse φHRm outputted fromthe horizontal scanning circuit 24 is applied to the horizontal resetline 19, and a horizontal scanning pulse φHSm to the gate electrode ofthe horizontal select MOS transistor 22, respectively. Thus, the circuitconfiguration is simplified since the horizontal scanning circuit 24serves also as a reset circuit which generates a horizontal reset pulseφHRm.

A correlated double sampling circuit (hereinafter referred to as CDScircuit) 25 of a simple configuration is provided at the output end ofthe horizontal signal line 21 to serve as a differential circuit whichtakes the difference between pixel pre-reset and post-reset signals. Aconcrete configuration of this CDS circuit 25 will be explained later indetail together with its operation. The output end of the CDS circuit 25is connected to an output terminal 26 of the image sensor.

Now the operation of the amplifying type solid-state image sensor in thefirst embodiment of the above structure will be described below withreference to a timing chart of FIG. 2.

First, the signal charge (electron) stored in the photodiode 12 throughphotoelectric conversion is converted into an electric signal by theamplifying MOS transistor 13. And subsequently during a horizontal videoperiod, a vertical scanning pulse φVn is outputted from the verticalscanning circuit 23, and then is applied to the respective gateelectrodes of the select MOS transistor 14 and the reset select MOStransistor 16 via the vertical select line 20. Consequently these MOStransistors 14 and 16 are turned on, so that the signal current appearson the vertical signal line 18 via the select MOS transistor 14.

During this horizontal video period, a horizontal scanning pulse φHSm isoutputted from the horizontal scanning circuit 24, and then is appliedto the gate electrode of the horizontal select MOS transistor 22.Consequently the MOS transistor 22 is turned on, so that the signalcurrent appearing on the vertical signal line 20 is caused to flow inthe horizontal signal line 21 via the horizontal select MOS transistor22, whereby the signal current is supplied via the horizontal signalline 21 to the CDS circuit 25.

Immediately thereafter, a horizontal reset pulse φHRm is supplied fromthe horizontal scanning circuit 24 to the horizontal reset line 19 withregard to the relevant pixel which has outputted the signal current.Since the reset select MOS transistor 16 is in its on-state at thistime, the horizontal reset pulse φHRm is applied to the gate electrodeof the reset MOS transistor 15 via the reset select MOS transistor 16.Consequently the reset MOS transistor 15 is turned on to thereby resetthe photodiode 12 to the VDD level.

As obvious from the timing chart of FIG. 2, this horizontal reset pulseφHRm is generated substantially at the midpoint of generation of thehorizontal scanning pulse φHSm. Therefore, the charge (noise component)of the photodiode 12 after extinction of the horizontal reset pulseφHRm, i.e., the post-reset signal charge thereof, is converted into acurrent by the amplifying MOS transistor 13, and this reset currentflows in the horizontal signal line 21 via the on-state select MOStransistor 14, the vertical signal line 18 and the on-state horizontalselect MOS transistor 22, and subsequently such reset current issupplied to the CDS circuit 25 via the horizontal signal line 21.

Due to a series of the operations mentioned, a signal output and a resetoutput are obtained sequentially in the form of signal output→PDreset→noise output relative to one pixel 11. Such operations areperformed in respect of the pixel row selected by the vertical scanningcircuit 23 with sequential selection of pixels by the horizontalscanning circuit 24, so that the outputs are delivered to the horizontalsignal line 21 in the order of mth column, nth row (signal output→PDreset→noise output), (m+1)th column, nth row (signal output→PDreset→noise output) . . . and so forth, and then are supplied to the CDScircuit 25. Subsequently, correlated double sampling is executed in thisCDS circuit 25 on the basis of such pre-reset and post-reset noiseoutputs, hence eliminating the characteristic deviation principally inthe amplifying MOS transistor 13.

FIG. 3 shows an exemplary concrete configuration of the CDS circuit 25.This circuit 25 comprises a current-voltage converter 32 whose input endis connected to an input terminal 31, a clamp capacitor 33 whose one endis connected to an output end of the current-voltage converter 32, aclamp MOS transistor 34 whose one main electrode is connected to theother end of the clamp capacitor 33, a sample hold MOS transistor 35whose one main electrode is connected to the other end of the clampcapacitor 33, a sample hold capacitor 36 connected between the othermain electrode of the sample hold MOS transistor 35 and the ground, anda buffer amplifier 37 connected between the other main electrode of thesample hold MOS transistor 35 and an output terminal 38.

In this CDS circuit 25, the current-voltage converter 32 consists of adifferential amplifier 39 which receives, at its inverting (−) input, asignal current supplied via the input terminal 31, and also receives apredetermined bias voltage Vb at its non-inverting (+) input; and afeedback resistor 40 connected between the inverting input end of thedifferential amplifier 39 and the output end thereof. This converter 32serves to convert the signal current into a signal voltage. A clampvoltage Vcl is applied to the other main electrode of the clamp MOStransistor 34, and a clamp pulse φCL to the gate electrode thereof,respectively. Further, a sample hold pulse φSH is applied to the gateelectrode of the sample hold MOS transistor 35.

Thus, due to such correlated double sampling based on the pre-resetsignal output and the post-reset noise output by using the CDS circuit25 of the above configuration as a differential circuit, it becomespossible to eliminate the characteristic deviation of the amplifying MOStransistor 13 per pixel, particularly the threshold voltage (Vth)deviation of the MOS transistor.

As described above, the photodiode 12 of each unit pixel 11 is resetevery time one pixel signal is outputted, and correlated double samplingis executed on the basis of the pre-reset signal output and thepost-reset noise output, hence suppressing the fixed pattern noisederived from the characteristic deviation in the pixel and also thefixed pattern noise of vertical streaks derived from the characteristicdeviation in the switch element (horizontal select MOS transistor 22)connected to the vertical signal line 18.

The fixed pattern noise derived from the characteristic deviation in thepixel is generated as an offset component from the amplifying MOStransistor 13 of the unit pixel 11, and fundamentally this noise can beeliminated by executing correlated double sampling of the pixelpre-reset and post-reset signals. As for the other fixed pattern noiseof vertical streaks derived from the characteristic deviation in theswitch element connected to the vertical signal line 18, the circuitconfiguration is so contrived as to supply the pixel pre-reset andpost-reset signals via the same signal path, not via separate switchelements (e.g., horizontal select MOS transistors), thereby preventinggeneration of such noise in principle.

Now a further detailed description will be given below on the operationof resetting the photodiode 12. As obvious from FIG. 1, each of thereset MOS transistor 15 and the reset select MOS transistor 16 consistsof a depletion type transistor.

In case an enhancement type transistor is employed as the reset selectMOS transistor 16, there arises a problem that, when resetting thephotodiode 12 to the VDD level, the reset select MOS transistor 16 actsin its saturation region as shown in FIG. 4A if a horizontal reset pulseφHRm is applied to the drain electrode thereof in the state selected bya vertical scanning pulse φVn, so that the source potential is renderedlower than the drain potential.

Meanwhile, in case a depletion type transistor is employed as the resetselect MOS transistor 16, this transistor acts in its linear region asshown in FIG. 4B, so that the source potential substantially reaches thedrain potential. Similarly, in case an enhancement type transistor isemployed as the reset MOS transistor 15, resetting is performed in itssaturation region, so that some charge may be left unremoved if thereset time is short, hence causing residual image. However, in case adepletion type transistor is employed, resetting is performed in itslinear region to thereby achieve complete resetting without anyunremoved charge.

Next, the operation of the amplifying type solid-state image sensor inthe embodiment of the above structure will be described below withreference to a potential diagram of FIG. 5 on the basis of a timingchart of FIG. 2.

In a selected-pixel signal read mode (timing a in FIG. 2), the resetselect MOS transistor 16 is turned on by a vertical scanning pulse φVn,so that a low-level potential of a horizontal reset pulse φHRmcorresponding to the source potential is applied to the gate electrodeof the reset MOS transistor 15. Since this MOS transistor 15 is notturned on at this time, the signal charge stored in the photodiode 12 isconverted into a signal current by the amplifying MOS transistor 13.

In a selected-pixel reset mode (timing b in FIG. 2), a high-levelhorizontal reset pulse φHRm is applied to the gate electrode of thereset MOS transistor 15 via the reset select MOS transistor 16 in anon-state, so that the reset MOS transistor 15 is turned on to therebyreset the photodiode 12 completely to the VDD level in its linearregion.

In a selected-pixel noise level read mode (timing c in FIG. 2), thehorizontal reset pulse φHRm is at its low level, and therefore alow-level potential is applied to the gate electrode of the reset MOStransistor 15 via the reset select MOS transistor 16 in an on-state,whereby the reset MOS transistor 15 is turned off. Consequently thereset level is converted into a noise current by the amplifying MOStransistor 13. And simultaneously, storage of the next frame is startedat this time point.

In a signal charge storage mode (timing d in FIG. 2), i.e., at the timeof reading another row and another column, the vertical scanning pulseφVm is changed to a low level. However, since the reset select MOStransistor 16 is of a depletion type, the gate electrode of the resetMOS transistor 15 is kept at its low level without being placed in afloating state.

In a nonselected-pixel reset mode (timing e in FIG. 2), the drain of thereset select MOS transistor 16 is turned to the VDD level by ahigh-level horizontal reset pulse φHRm, and then the potentialcorresponding to the low level of the gate electrode of the reset selectMOS transistor 16 is applied to the gate electrode of the reset MOStransistor 15. In the photodiode 12, the depletion reset gate servesdirectly as a transverse overflow barrier, and any excess charge abovethis level is dumped to the power supply. And the overflow barrier islowered at this time point, where the overflow level is therebydetermined.

Regarding the structure of each unit pixel, there is generally contrivedan example where, as shown in FIG. 6 or FIG. 7, the reset MOS transistor15 and the reset select MOS transistor 16 are connected in seriesbetween the cathode electrode of the photodiode 12 and the power supplyline 17, and a horizontal reset pulse φHRm or a vertical scanning pulseφVn is applied to the gate electrode of the reset MOS transistor 15,while a vertical scanning pulse φVn or a horizontal reset pulse φHRm isapplied to the gate electrode of the reset select MOS transistor 16.

In such an exemplary structure, however, there exists a disadvantagethat the feedthrough obtained by the reset MOS transistor 15 and thereset select MOS transistor 16 at the time of reading the noise levelbecomes different from the feedthrough at the time of reading the signallevel, hence causing some deviation per pixel. The reason thereof willnow be described below with reference to a potential diagram of FIG. 8which corresponds to the structure of FIG. 6.

Suppose first that status 1 represents a condition where a pixel isselected by generation of a vertical scanning pulse φVn and resetting isexecuted by generation of a horizontal reset pulse φHRm. In status 1,the photodiode 12 is reset to the VDD level. Subsequently in status 2,the horizontal reset pulse φHRm is extinct, and the potential of thephotodiode 12 is rendered slightly shallower than the VDD level due tothe feedthrough when the reset MOS transistor 15 is turned off. In thisstatus, a noise level read mode is assumed.

In status 3, a nonselection mode is assumed upon extinction of thevertical scanning pulse φVn. The potential of the diffusion regionbetween the reset MOS transistor 15 and the reset select MOS transistor16 is rendered slightly shallower than the VDD level due to thefeedthrough when the reset select MOS transistor 16 is turned off.

Status 4 represents a charge storage condition where the potential ofthe photodiode 12 is shallowed by the stored charge. Status 5 representsa nonselection reset condition where the same column on the other rowsis reset. In this status, the reset MOS transistor 15 is turned on bygeneration of a horizontal reset pulse φHRm, so that the signal charge,the reset gate feedthrough and the reset select gate feedthrough areadjusted.

In status 6, the reset gate feedthrough is further added to thephotodiode 12 upon extinction of the horizontal reset pulse φHRm. Status5 and status 6 are repeated during a period of reading the other rows.In status 7, the reset select MOS transistor 16 is turned on bygeneration of a vertical scanning pulse φVn, and the signal level isread in this status. Thereafter the operation returns to status 1.

As obvious from a comparison of status 2 with status 7 in the potentialdiagram of FIG. 8, the charge quantity stored in the photodiode 12 dueto the feedthrough at the noise level read time in status 2 is differentfrom the charge quantity stored at the signal level read time in status7. Since the feedthrough quantity differs depending on individualtransistors similarly to the threshold voltage deviation, thefeedthrough difference between the signal level read mode and the noiselevel read mode cannot be canceled in the CDS circuit 25 which is usedto suppress the pixel deviation, whereby such feedthrough difference isleft unmoved as pixel deviation.

Also in the structure of FIG. 7 where the reset MOS transistor 15 andthe reset select MOS transistor 16 are mutually connected in reverserelationship, the same disadvantage as that in the structure of FIG. 6is still existent, as obvious from a potential diagram of FIG. 9.

In contrast therewith, this embodiment is so contrived that the sourceelectrode of the reset select MOS transistor 16 is connected to the gateelectrode of the reset MOS transistor 15, and a horizontal reset pulseφHRm is applied to the gate electrode of the reset MOS transistor 15 viathe drain and source electrodes of the reset select MOS transistor 16.Therefore, in either the noise read mode or the signal read mode, theoperation is not affected harmfully by the feedthrough relative to thereset select gate, hence enabling the CDS circuit 25 in the followingstage to suppress the feedthrough deviation derived from the reset gateper pixel.

FIG. 10 is a block diagram showing the structure of a second embodimentof the present invention applied to a one-dimensional solid-state imagesensor.

In FIG. 10, the area enclosed with a broken line represents a unit pixel51. This unit pixel 51 is composed of a photodiode (PD) 52 as aphotoelectric conversion element, an amplifying MOS transistor 53 as anamplifying element, a select MOS transistor 54 as a select switch, and areset MOS transistor 55 as a reset switch. Entire unit pixels arearrayed linearly in a one-dimensional arrangement.

In this unit pixel 51, the photodiode 52 has a function of executingphotoelectric conversion of incident light and storing the signal chargeobtained through such photoelectric conversion. A gate electrode of theamplifying MOS transistor 53 is connected to a cathode electrode of thephotodiode 52, while a drain electrode of the amplifying MOS transistor53 is connected to a power supply (VDD) line 56.

The select MOS transistor 54 is connected between a source electrode ofthe amplifying MOS transistor 53 and a signal line 57. And the reset MOStransistor 55 is connected between the cathode electrode of thephotodiode 52 and the power supply line 56. The reset MOS transistor 55consists of a depletion type transistor.

Further a scanning circuit 58 is provided for sequentially selecting theunit pixels 51 arrayed one-dimensionally. And a scanning pulse φHSmoutputted from the scanning circuit 58 is applied to the gate electrodeof the select MOS transistor 54, and a reset pulse φHRm to the gateelectrode of the reset MOS transistor 55, respectively. Thus, thecircuit configuration is simplified since the scanning circuit 58 servesalso as a reset circuit which generates a reset pulse φHRm.

A CDS circuit 59 of a simple configuration is provided at the output endof the signal line 57 to serve as a differential circuit which takes thedifference between pixel pre-reset and post-reset signals. Similarly tothe foregoing first embodiment, this CDS circuit 59 is so composed asshown in FIG. 3.

Now the operation of the amplifying type solid-state image sensor in thesecond embodiment of the above structure will be described below withreference to a timing chart of FIG. 11.

First, the signal charge (electron) stored in the photodiode 52 throughphotoelectric conversion is further converted into a charge signal bythe amplifying MOS transistor 53. And when a scanning pulse φHSm isoutputted from the scanning circuit 58, the select MOS transistor 54 isturned on, so that a signal current is supplied via the select MOStransistor 54 to the CDS circuit 59 by way of the signal line 57.

Immediately thereafter, a reset pulse φHRm is outputted from thescanning circuit 58 with regard to the relevant pixel which hasoutputted the signal current, and then this pulse is applied to the gateelectrode of the reset MOS transistor 55. Since the reset MOS transistor55 is thereby turned on at this time, the photodiode 52 is reset to theVDD level.

As obvious from the timing chart of FIG. 11, this reset pulse φHRm isgenerated in the duration (high-level period) of the scanning pulseφHSm. Therefore, the charge (noise component) of the photodiode 52 afterextinction of the reset pulse φHRm, i.e., the post-reset signal chargethereof, is converted into a current by the amplifying MOS transistor53, and this reset current flows in the signal line 57 via the on-stateselect MOS transistor 54, and subsequently such reset current issupplied to the CDS circuit 59 via the signal line 57.

Due to a series of the operations mentioned, a signal output and a resetoutput are obtained sequentially in the form of signal output→PDreset→noise output relative to one pixel 51, and then are supplied tothe CDS circuit 59. Subsequently, correlated double sampling is executedin this CDS circuit 59 on the basis of such pre-reset and post-resetnoise outputs, hence eliminating the characteristic deviationprincipally in the amplifying MOS transistor 53.

Now a further detailed description will be given below on the operationof resetting the photodiode 52. As obvious from FIG. 10, the reset MOStransistor 55 consists of a depletion type transistor.

In case an enhancement type transistor is employed as the reset MOStransistor 55, there arises a problem that, when resetting thephotodiode 52 to the VDD level, the reset MOS transistor 55 acts in itssaturation region as shown in FIG. 4A if the voltage from the powersupply VDD is applied to the drain electrode thereof in the stateselected by the reset pulse φHRm, so that the source potential isrendered lower than the drain potential, and some charge may be leftunremoved if the reset time is short, hence causing residual image.

Meanwhile, in case a depletion type transistor is employed as the resetMOS transistor 55, this transistor acts in its linear region as shown inFIG. 4B, so that the source potential substantially reaches the drainpotential to thereby achieve complete resetting without any unremovedcharge.

Next, the operation of the amplifying type solid-state image sensor inthe second embodiment of the above structure will be described belowwith reference to a potential diagram of FIG. 12 on the basis of atiming chart of FIG. 11.

In a signal read mode (timing a in FIG. 11), the reset MOS transistor 55is not turned on, so that the signal charge stored in the photodiode 52is converted into a signal current by the amplifying MOS transistor 53.

In a reset mode (timing b in FIG. 11), a high-level reset pulse φHRm isapplied to the gate electrode of the reset MOS transistor 55, wherebythe reset MOS transistor 55 is turned on to reset the photodiode 52completely to the VDD level in its linear region.

In a noise level read mode (timing c in FIG. 11), the reset pulse φHRmis at its low level, and therefore the reset MOS transistor 55 is turnedoff. Consequently the reset level is converted into a noise current bythe amplifying MOS transistor 53. And simultaneously, storage of thenext frame is started at this time point (timing d in FIG. 11).

In the photodiode 52, the depletion reset gate serves directly as atransverse overflow barrier, and any excess charge above this level isdumped to the power supply. The overflow level corresponds to the lowlevel of the gate potential of the reset MOS transistor 55.

FIG. 13 is a schematic block diagram showing an exemplary structure of acamera of the present invention which employs the aforementionedsolid-state image sensor and the method of driving the same.

In FIG. 13, incident light from an object scene is focused on an imageforming plane of a solid-state image sensor 220 by an optical systemincluding a lens 210. The solid-state image sensor 220 has the structureexplained above. This image sensor is driven on the basis of theaforementioned method by means of a drive 230 including an unshowntiming generator.

The output signal of the solid-state image sensor 220 is processed in asignal processor 240 through various stages to become a video signal.

As described hereinabove, according to the solid-state image sensor ofthe present invention where each of unit pixels has an amplifyingfunction, the relevant photoelectric conversion element is completelyreset every time a pixel signal is outputted from each unit pixel,whereby signal components and noise components can be outputtedsuccessively from the pixels, so that fixed pattern noise can besuppressed by taking the difference between the pre-reset and post-resetsignals. Further, any residual image is not generated owing to completeresetting of each pixel, and generation of fixed pattern noise withvertical streaks can also be suppressed since the signal component andthe noise component are outputted via the same path from the verticalsignal line to the horizontal signal line.

Although the present invention has been described with reference to somepreferred embodiments thereof, it is to be understood that the inventionis not limited to such embodiments alone, and a variety of other changesand modifications will be apparent to those skilled in the art withoutdeparting from the spirit of the invention.

The scope of the invention, therefore, is to be determined solely by theappended claims.

1. A solid-state image sensor comprising: (a) unit pixels, each of whichhas (i) a photoelectric conversion element which converts incident lightinto an electric signal charge, (ii) an amplifying element whichamplifies said electric signal charge of said photoelectric conversionelement and generates an electric signal, (iii) a reset element whichresets said photoelectric conversion element in response to a resetpulse, (iv) a select switch which selectively outputs the electricsignal from said amplifying element to a signal line as a pixel signalin response to a select pulse, and (v) a common power supply connectionwhich is connected to both a drain of said reset element and a drain ofsaid amplifying element; and (b) a horizontal scanning circuit elementoperatively connected to said reset element and said select switch byseparate signal lines and effective to generate and deliver said resetpulse and said select pulse, wherein, the reset element consists of adepletion type transistor, and the voltage of the common power supply isfixed.